diff --git a/.browserslistrc b/.browserslistrc
index 86481f8e08..516fec9cec 100644
--- a/.browserslistrc
+++ b/.browserslistrc
@@ -10,6 +10,12 @@ supports es6-module-dynamic-import
 not Safari < 13
 not iOS < 13
 
+# Exclude KaiOS, QQ, and UC browsers due to lack of sufficient feature support data
+# Babel ignores these automatically, but we need here for Webpack to output ESM with dynamic imports
+not KaiOS > 0
+not QQAndroid > 0
+not UCAndroid > 0
+
 # Exclude unsupported browsers
 not dead
 
diff --git a/build-scripts/bundle.cjs b/build-scripts/bundle.cjs
index a6d14f18c8..f840f21762 100644
--- a/build-scripts/bundle.cjs
+++ b/build-scripts/bundle.cjs
@@ -77,6 +77,7 @@ module.exports.htmlMinifierOptions = {
 module.exports.terserOptions = ({ latestBuild, isTestBuild }) => ({
   safari10: !latestBuild,
   ecma: latestBuild ? 2015 : 5,
+  module: latestBuild,
   format: { comments: false },
   sourceMap: !isTestBuild,
 });
diff --git a/build-scripts/webpack.cjs b/build-scripts/webpack.cjs
index 58cc184ca8..0ff76cc832 100644
--- a/build-scripts/webpack.cjs
+++ b/build-scripts/webpack.cjs
@@ -41,7 +41,7 @@ const createWebpackConfig = ({
   return {
     name,
     mode: isProdBuild ? "production" : "development",
-    target: ["web", latestBuild ? "es2017" : "es5"],
+    target: `browserslist:${latestBuild ? "modern" : "legacy"}`,
     // For tests/CI, source maps are skipped to gain build speed
     // For production, generate source maps for accurate stack traces without source code
     // For development, generate "cheap" versions that can map to original line numbers
@@ -84,6 +84,13 @@ const createWebpackConfig = ({
       ],
       moduleIds: isProdBuild && !isStatsBuild ? "deterministic" : "named",
       chunkIds: isProdBuild && !isStatsBuild ? "deterministic" : "named",
+      splitChunks: {
+        // Disable splitting for web workers with ESM output
+        // Imports of external chunks are broken
+        chunks: latestBuild
+          ? (chunk) => !chunk.canBeInitial() && !/^.+-worker$/.test(chunk.name)
+          : undefined,
+      },
     },
     plugins: [
       !isStatsBuild && new WebpackBar({ fancy: !isProdBuild }),
@@ -163,6 +170,7 @@ const createWebpackConfig = ({
       },
     },
     output: {
+      module: latestBuild,
       filename: ({ chunk }) =>
         !isProdBuild || isStatsBuild || dontHash.has(chunk.name)
           ? "[name].js"
@@ -196,7 +204,7 @@ const createWebpackConfig = ({
           : undefined,
     },
     experiments: {
-      topLevelAwait: true,
+      outputModule: true,
     },
   };
 };
diff --git a/src/components/data-table/sort_filter_worker.ts b/src/components/data-table/sort-filter-worker.ts
similarity index 100%
rename from src/components/data-table/sort_filter_worker.ts
rename to src/components/data-table/sort-filter-worker.ts
diff --git a/src/components/data-table/sort-filter.ts b/src/components/data-table/sort-filter.ts
index 67d7679397..e0eacf3305 100644
--- a/src/components/data-table/sort-filter.ts
+++ b/src/components/data-table/sort-filter.ts
@@ -1,5 +1,5 @@
 import { Remote, wrap } from "comlink";
-import type { Api } from "./sort_filter_worker";
+import type { Api } from "./sort-filter-worker";
 
 type FilterDataType = Api["filterData"];
 type FilterDataParamTypes = Parameters<FilterDataType>;
@@ -9,27 +9,28 @@ type SortDataParamTypes = Parameters<SortDataType>;
 
 let worker: Remote<Api> | undefined;
 
+const getWorker = () => {
+  if (!worker) {
+    worker = wrap(
+      new Worker(
+        /* webpackChunkName: "sort-filter-worker" */
+        new URL("./sort-filter-worker", import.meta.url)
+      )
+    );
+  }
+  return worker;
+};
+
 export const filterData = (
   data: FilterDataParamTypes[0],
   columns: FilterDataParamTypes[1],
   filter: FilterDataParamTypes[2]
-): Promise<ReturnType<FilterDataType>> => {
-  if (!worker) {
-    worker = wrap(new Worker(new URL("./sort_filter_worker", import.meta.url)));
-  }
-
-  return worker.filterData(data, columns, filter);
-};
-
+): Promise<ReturnType<FilterDataType>> =>
+  getWorker().filterData(data, columns, filter);
 export const sortData = (
   data: SortDataParamTypes[0],
   columns: SortDataParamTypes[1],
   direction: SortDataParamTypes[2],
   sortColumn: SortDataParamTypes[3]
-): Promise<ReturnType<SortDataType>> => {
-  if (!worker) {
-    worker = wrap(new Worker(new URL("./sort_filter_worker", import.meta.url)));
-  }
-
-  return worker.sortData(data, columns, direction, sortColumn);
-};
+): Promise<ReturnType<SortDataType>> =>
+  getWorker().sortData(data, columns, direction, sortColumn);
diff --git a/src/resources/markdown_worker.ts b/src/resources/markdown-worker.ts
similarity index 100%
rename from src/resources/markdown_worker.ts
rename to src/resources/markdown-worker.ts
diff --git a/src/resources/render-markdown.ts b/src/resources/render-markdown.ts
index fb9b8cf438..85c584c939 100644
--- a/src/resources/render-markdown.ts
+++ b/src/resources/render-markdown.ts
@@ -1,5 +1,5 @@
 import { Remote, wrap } from "comlink";
-import type { Api } from "./markdown_worker";
+import type { Api } from "./markdown-worker";
 
 type RenderMarkdownType = Api["renderMarkdown"];
 type RenderMarkdownParamTypes = Parameters<RenderMarkdownType>;
@@ -12,8 +12,12 @@ export const renderMarkdown = async (
   hassOptions?: RenderMarkdownParamTypes[2]
 ): Promise<ReturnType<RenderMarkdownType>> => {
   if (!worker) {
-    worker = wrap(new Worker(new URL("./markdown_worker", import.meta.url)));
+    worker = wrap(
+      new Worker(
+        /* webpackChunkName: "markdown-worker" */
+        new URL("./markdown-worker", import.meta.url)
+      )
+    );
   }
-
   return worker.renderMarkdown(content, markedOptions, hassOptions);
 };
diff --git a/test/webpack.config.js b/test/webpack.config.js
index 20e1e163e3..ad593b58aa 100644
--- a/test/webpack.config.js
+++ b/test/webpack.config.js
@@ -1,8 +1,13 @@
 import webpack from "../build-scripts/webpack.cjs";
 
-export default webpack.createAppConfig({
+const config = webpack.createAppConfig({
   isProdBuild: false,
   latestBuild: true,
   isStatsBuild: false,
   isTestBuild: true,
 });
+
+// instant-mocha forces a CJS library, so cannot output ESM
+config.output.module = false;
+
+export default config;